Study of corrosion rate control mechanism based on magnetorheological electro-Fenton composite polishing of single-crystal GaN wafers |
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| Authors: | Wu Yusen Pan Jisheng Wang Hao Shen Zhuoshan Luan Tianxin Yan Qiusheng |
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| Affiliation: | 1.School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou, 510006, China
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| Abstract: | Journal of Solid State Electrochemistry - A magnetorheological electro-Fenton composite polishing technology was proposed that enables chemical and mechanical “double enhancement” of... |
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