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双频光栅轮廓术的研究
引用本文:周灿林,亢一澜.双频光栅轮廓术的研究[J].光学技术,2005,31(1):139-141.
作者姓名:周灿林  亢一澜
作者单位:天津大学,力学系,天津,300072;山东大学,物理与微电子学院,济南,250061;天津大学,力学系,天津,300072
摘    要:在投影栅相位法轮廓检测中,当物体含突变部分时,包裹相位很难准确恢复,对此可用双频变精度技术来解决。如果用两种不同频率光栅分两次进行测量,无疑增加了测量负担,也无法满足实时检测的要求。提出用软件生成两种不同频率成分的复合正弦光栅,用液晶投影仪投影,针对不同物体具体突变部分的情况,可灵活生成各种不同灵敏度的复合光栅。只采一次图像就可以达到以往双频技术中多次采集的效果,该法具有快速和去包裹精度高的特点。最后,进行了实验测试,结果非常满意。

关 键 词:形貌检测  傅里叶变换  相位分布  相位去包裹  双频光栅
文章编号:1002-1582(2005)01-0139-03
修稿时间:2004年2月25日

Study of profilometry with dual-frequency grating
ZHOU Can-lin,KANG Yi-lan.Study of profilometry with dual-frequency grating[J].Optical Technique,2005,31(1):139-141.
Authors:ZHOU Can-lin  KANG Yi-lan
Institution:ZHOU Can-lin~
Abstract:The phase unwrapping is a very difficult problem for profilometry of object containing depth discontinuities. The problem can be resolved with dual-frequency measurement technique. Two measurements with dual different frequencies can not be contented with real-time demand. The new profilometry is based on compound grating, generated by computer software, projected by liquid crystal projector, so that the grating with different precision is easily created, conveniently changed .The same purpose is obtained as capturing two different frequencies' deforming gratings. The method has high speed and accurate unwrapping. Satisfactory experimental results are demonstrated.
Keywords:shape measurement  Fourier transform  phase distribution  phase unwrapping  two-frequency grating
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