A comparison of ion-induced electron emission and secondary ion yields |
| |
Authors: | R. H. Milne E. A. Maydell D. J. Fabian |
| |
Affiliation: | (1) Department of Physics and Applied Physics, University of Strathclyde, North Portland Street, G1 1XN Glasgow, U.K.;(2) Present address: School of Mathematical and Physical Sciences, Physics and Astronomy Division, University of Sussex, BN1 9QH Brighton, U.K. |
| |
Abstract: | Ion-induced electron emission from solid surfaces is studied using a beam of caesium ions. Features of the spectra obtained during depth profiling of layered structures suggest a novel technique for investigating ion-induced Auger processes. Depth profiles are presented in terms of measured secondary ion signals, electron-induced Auger emission, and the intensities of features in the ion-induced electron spectra. It is shown that changes in features of the ion-induced electron spectra can be related to changes of chemical composition and sputtering probability. These help in the interpretation of variations in secondary-ion yields with matrix composition during depth profiling. |
| |
Keywords: | 79.20F 79.20N |
本文献已被 SpringerLink 等数据库收录! |
|