Untersuchung von implantierten Schichten (N2+, CO+) von Werkzeugst?hlen mit dem AES-Verfahren

Summary The paper deals with the depth distribution of implanted elements from the surface, i.e., the concentration profile, studied by means of Auger electron spectroscopy. Results obtained in low carbon CrMoV tool steel implanted with N₂⁺or CO⁺ ions have been correlated with theoretical curves which were calculated by the LSS method for pure -iron.Low doses of implanted nitrogen (1.5 and 2.0 · 10¹⁷ ions/ cm²) exhibit no differences between measured concentration profiles and theoretical distribution, while a high dose (4.0 · 10¹⁷ ions/cm²) induced profile deformation together with sputtering of the material surface. By bombardment with carbon monoxide (1.5 – 4.0 · 10¹⁷ ions/cm²), these molecular ions are split after their incidence and carbon as well as oxygen atoms can move independently within the material. The position of the oxygen concentration profiles correspond to the theoretically found curves (the true heights of the profile being substantially lower), whereas the concentration profiles of carbon are very flat and of asymmetrical shape.