Pressure effects during pulsed-laser deposition of barium titanate thin films |
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| Authors: | J Gonzalo R Gómez San Román J Perrière CN Afonso R Pérez Casero |
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| Institution: | (1) Instituto de Optica, CSIC, Serrano 121, 28006 Madrid, Spain (Fax: +34-1/5645-557, E-mail: iodfv30@pinar1.csic.es), ES;(2) Departamento de Física Aplicada C-XII, Universidad Autónoma de Madrid, 28049 Cantoblanco, Madrid, Spain, ES;(3) Groupe de Physique des Solides, Universités Paris VII et VI, URA 17 du CNRS, Tour 23, 2 Place Jussieu, 75251 Paris Cedex 05, France, FR |
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| Abstract: | 2 , Ar) in a broad pressure range (10-7–1 mbar) are correlated to the plasma expansion dynamics. It is found that the deposited films present an excess of Ba in
the intermediate pressure range (10-2<P<10-1 mbar) and a peaked distribution of Ba to Ti atoms ratio, that is not related to either the substrate temperature or the nature
of the gas environment. The results are discussed in terms of the dependence of the plume length (LP) on the gas pressure and the existence of scattering processes for distances (d) from the target lower than LP and the diffusion of the ejected species for LP<d.
Received: 7 November 1997/Accepted: 8 November 1997 |
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| Keywords: | PACS: 81 15 Fg 77 84 Dy 78 47 +p |
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