Diamond-like-carbon films produced by magnetically guided pulsed laser deposition |
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Authors: | H Minami D Manage YY Tsui R Fedosejevs M Malac R Egerton |
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Institution: | (1) Department of Electrical and Computer Engineering, University of Alberta, Edmonton, Alberta, Canada T6J 2V4, CA;(2) Department of Physics, University of Alberta, Edmonton, Alberta, Canada T6G 2J1, CA |
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Abstract: | We have compared the quality of carbon films deposited with magnetically guided pulsed laser deposition (MGPLD) and conventional
pulsed laser deposition (PLD). In MGPLD, a curved magnetic field is used to guide the plasma but not the neutral species to
the substrate to deposit the films while, in conventional PLD, the film is deposited with a mixture of ions, neutral species
and clusters. A KrF laser pulse (248 nm) was focused to intensities of 10 GW/cm2 on a carbon source target and a magnetic field strength of 0.3 T was used to steer the plasma around a curved arc to the
deposition substrate. Electron energy loss spectroscopy was used in order to measure the fraction of sp3 bonding in the films produced. It is shown that the sp3 fraction, and hence the diamond-like character of the films, increased when deposited only with the pure ion component by
MGPLD compared with films produced by the conventional PLD technique. The dependence of film quality on the laser intensity
is also discussed.
Received: 7 December 2000 / Accepted: 20 August 2001 / Published online: 2 October 2001 |
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Keywords: | PACS: 81 15 Fg 52 75 Rx 68 55 -a |
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