| 钙钛矿型氧化物透明导电薄膜La:SrTiO3的制备、结构与物性研究 |
| |
| 引用本文： | 陈乐,刘亲壮,王海峰,高关胤,吴文彬. 钙钛矿型氧化物透明导电薄膜La:SrTiO3的制备、结构与物性研究[J]. 低温物理学报, 2009, 31(2): 97-101 |
| |
| 作者姓名： | 陈乐 刘亲壮 王海峰 高关胤 吴文彬 |
| |
| 作者单位： | 合肥微尺度物质科学国家实验室,中国科学技术大学,合肥,230026;合肥微尺度物质科学国家实验室,中国科学技术大学,合肥,230026;合肥微尺度物质科学国家实验室,中国科学技术大学,合肥,230026;合肥微尺度物质科学国家实验室,中国科学技术大学,合肥,230026;合肥微尺度物质科学国家实验室,中国科学技术大学,合肥,230026 |
| |
| 基金项目： | 国家科技部资助项目，国家自然科学基金 |
| |
| 摘 要： | 本文采用脉冲激光沉积法于不同沉积温度与衬底制备了一系列的La0.05 Sr0.95 TiO3(LSTO)单晶透明导电薄膜.实验主要研究了高温高氧压条件下沉积的LSTO薄膜的结构及电、光学性质.它们具有良好的外延结构,表现出很好的透明、导电性质.对电阻率拟合发现其导电机制符合电子.电子散射机制.由于制备条件与其它多种钙钛矿型氧化物薄膜一致,可广泛集成应用.用其作为电极所制备的PbZr0.52 Ti0.48O3(PZT)外延铁电电容器,具有很好的电滞回线和透光性.
|
| 关 键 词： | 透明导电薄膜 电阻率 铁电电容器 |
TRANSPARENT AND CONDUCTIVE OXIDE FILMS WITH PEROVSKITE-TYPE STRUCTURE:LaSrTiO_3 |
| |
| CHEN Le LIU Qin-zhuang WANG Hai-feng GAO Guan-yin WU Wen-bin Hefei National Laboratory for Physical Sciences at Microscale,University of Science , Technology of China,Hefei. TRANSPARENT AND CONDUCTIVE OXIDE FILMS WITH PEROVSKITE-TYPE STRUCTURE:LaSrTiO_3[J]. Chinese Journal of Low Temperature Physics, 2009, 31(2): 97-101 |
| |
| Authors: | CHEN Le LIU Qin-zhuang WANG Hai-feng GAO Guan-yin WU Wen-bin Hefei National Laboratory for Physical Sciences at Microscale University of Science Technology of China Hefei |
| |
| Affiliation: | CHEN Le LIU Qin-zhuang WANG Hai-feng GAO Guan-yin WU Wen-bin Hefei National Laboratory for Physical Sciences at Microscale,University of Science , Technology of China,Hefei 230026 |
| |
| Abstract: | Transparent and conductive oxide films with the perovskite-type structure,La0.05Sr0.95TiO3(LSTO),have been grown by the pulsed laser deposition method.It was revealed that the films grown at high oxygen pressure show high single-crystallinity with the perovskite structure,and remarkably,these films are both electrically conductive and visually transparent in the visible range. The growth parameters are compatible with those for some other perovskite films,indicating a potential for transparent devices. The ... |
| |
| Keywords: | transparent and conductive films resistivity ferroelectric capacitors |
| 本文献已被 CNKI 万方数据 等数据库收录！ |
|
