软X射线-真空紫外波段光谱光源研究

介绍长春光学精密机械与物理研究所进行的软X射线-真空紫外波段光谱光源研究工作。研制成功的壁稳氩弧光源光谱辐射稳定性和重复性达±0.3%，可作标准辐射源，用于真空紫外波段仪器光谱强度绝对辐射定标。研制成功的潘宁(Penning)光源、双等离子体光源和空心阴极光源，可以覆盖从十几个nm至几十nm波段范围，光谱辐射稳定性和重复性达±1.0%，提供不同工作气体在该波段的原子和离子线谱，用于光谱仪器的波长定标。所研制的激光等离子体光源，尤其是近期研制成功的无污染微液滴喷射靶激光等离子体光源，可以提供较高亮度的软X射线辐射，13.0 nm处激光-软X射线转换效率达0.75%／2π·sr／2%带宽，适合于光刻和该波段辐射计量研究。

Development of Soft X-Ray and Vacuum Ultraviolet Spectrum Sources

The soft X-ray and vacuum ultraviolet sources developed in CIOMP are presented. The wall-stabilized argon arc source with spectrum stability and repeatability of +/-0.3% is applied to the calibration of spectrum intensity distribution of the vacuum ultraviolet instruments as an absolute standard source. The Penning source, duobplasma source and hollow cathode source are able to produce atomic and ionic line spectra as a wavelength standard source, which covers a few nanometers to several tens nanometers with spectrum radiation stability and repeatability of +/-1.0%. In particular, the low debris laser produced plasma source with liquid aerosol spray target recently developed can emit stronger soft X-ray for soft X-ray lithography and metrology, which has a transfer efficiency as high as 0.75%/2pi x sr/2% bandwidth.