Unusual elastic behavior of nanocrystalline diamond thin films |
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Authors: | Tanei H Nakamura N Ogi H Hirao M Ikeda R |
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Affiliation: | Graduate School of Engineering Science, Osaka University, Toyonaka, Osaka 560-8531, Japan. |
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Abstract: | This Letter studies the relationship between the elastic constants and the microstructure of nanocrystalline diamond thin films deposited by the chemical vapor deposition method doping various concentration of N2 gas. The elastic constants were measured by resonant ultrasound spectroscopy and picosecond laser ultrasounds. The increase of N2 gas decreases the diagonal elastic constants, but increases the off-diagonal elastic constants. The micromechanics calculation can explain this unusual elastic behavior, and it predicts thin graphitic phases at grain boundaries. |
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