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Growth and structure of Bi0.5(Na0.7K0.2Li0.1)0.5TiO3 thin films prepared by pulsed laser deposition technique |
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| Authors: | Lei Lu Dingquan Xiao Dunmin Lin Yongbin Zhang |
| Institution: | a School of Material Science and Engineering, Sichuan University, 610064 Chengdu, China b China Academy of Engineer Physics, 621900 Mianyang, China c Department of Applied Physics, Hong Kong Polytechnic University, Kowloon, Hong Kong, China |
| Abstract: | Bi0.5(Na0.7K0.2Li0.1)0.5TiO3 (BNKLT) thin films were prepared on Pt/Ti/SiO2/Si substrates by pulsed laser deposition (PLD) technique. The films prepared were examined by using X-ray diffraction (XRD), scanning electron microscopy (SEM) and atomic force microscopy (AFM). The effects of the processing parameters, such as oxygen pressure, substrate temperature and laser power, on the crystal structure, surface morphology, roughness and deposition rates of the thin films were investigated. It was found that the substrate temperature of 600 °C and oxygen pressure of 30 Pa are the optimized technical parameters for the growth of textured film, and all the thin films prepared have granular structure, homogeneous grain size and smooth surfaces. |
| Keywords: | 68 55 Jk 81 15 Fg 77 84 Dy |
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