Electrochemical synthesis and application of NF3

Electrolytic production of nitrogen trifluoride (NF₃) was reviewed. Electrolytic production of NF₃ using a nickel anode is more useful method from view points of the yield and purity of NF₃, especially, free from carbon tetrafluoride (CF₄), but has a few problems to be solved. At present, electrolysis of a molten NH₄F-KF-HF system using a carbon anode is developing, because no anode consumption and no storage of nickel sludge in the melt take place.Reaction of NF₃ with phosphorus sulfide, preparation of functionally gradient fluorocarbon films and carbonaceous thin films by plasma technique using NF₃, and reactive ion etching of Si, SiO₂, and SiC using NF₃ plasma were reported for the purpose of development on application of NF₃.