| 钌系厚膜片式电阻器热处理工艺的研究 |
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| 引用本文： | 刘仲娥,赵鹏,李栋.钌系厚膜片式电阻器热处理工艺的研究[J].压电与声光,2000,22(2):81-82,89. |
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| 作者姓名： | 刘仲娥 赵鹏 李栋 |
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| 作者单位： | 天津大学,电信工程学院,天津,300072 |
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| 基金项目： | 教育部军工配套研究项目 |
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| 摘 要： | 研究了热处理工艺对钌系厚膜电阻器的温度系数（ＴＣＲ）和短时间过负载性能的影响,发现适当的热处理工艺可以改善厚膜电阻器的电性能。为探讨热处理工艺对电阻膜层微观结构的影响,对热处理前后的电阻膜层进行了ＳＥＭ形貌分析。
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| 关 键 词： | 厚膜电阻器 温度系统 钌系 热处理工艺 |
Research on Heat Treatment Technology for Thick Film Resistors Based on Ru |
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| LIU Zhong-e,ZHAO Peng,LI Dong.Research on Heat Treatment Technology for Thick Film Resistors Based on Ru[J].Piezoelectrics & Acoustooptics,2000,22(2):81-82,89. |
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| Authors: | LIU Zhong-e ZHAO Peng LI Dong |
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| Abstract: | This paper illustrates the influence of heat treatment technology on the electronic performance of thick film resistors (TFR)based on Ru. It has been found that TFR's properties of temperature coefficient (TCR) and short-time overloaded can be enhanced with proper heat treatment technology. In order to analyze the influence of heat treatment on the microstructure of the resistance film,the SEM photos of resistance film are attained and studied. |
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| Keywords: | thick film resistors temperature coefficient short-time overloaded |
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