Electron energy loss spectrometry mapping

Among electron beam microanalytical techniques, electron energy loss spectrometry (EELS) offers unique advantages in terms of information content, sensitivity, limits of detection. This paper describes new methods and tools for acquiring families of spectra over many pixels on the specimen, i.e. spectrumimages, and for processing them. Applications in different fields of research, both in materials science and in life sciences, demonstrate the potential impact of the technique for characterizing nano-sized structures.