Analytical glow discharge mass spectrometry

Various types of glow discharge mass spectrometric systems as well as their applications are considered. Special attention is paid to radiofrequency and pulsed glow discharges combined with time-of-flight mass spectrometers. Along with typical application fields of glow discharge mass spectrometry, analysis of semiconductors, polymers, and dielectrics, as well as isotope analysis and depth profiling are also reviewed. Some methods of standard-free mass spectrometric analysis of solids are considered. Prospects for combining glow discharge mass spectrometry with preliminary chromatographic separation are discussed.