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Sensitivity of Homogeneity Mapping of Semiconducting Wafer Using Millimeter Waves |
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| Authors: | Kancleris A Laurinaviius and T Anbinderis |
| Institution: | (1) Semiconductor Physics Institute, A. Go tauto 11, 01108 Vilnius, Lithuania, E-mail:;(2) Joint Stock Company  Elmika , Naugarduko. 41, 03227, Vilnius, Lithuania; E-mail: |
| Abstract: | The homogeneity mapping by measuring the phase or the amplitude of millimeter wave reflected from or transmitted through the semiconducting wafer is considered. The sensitivity of the conductivity homogeneity mapping is determined and conditions at which conductivity inhomogeneities can be distinguished from dielectric constant inhomogeneities are established. |
| Keywords: | millimeter waves material homogeneity mapping measurement sensitivity |
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