| 亚波长消反射光栅 |
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| 引用本文： | 陈四海,程志军,黄光,何苗,易新建.亚波长消反射光栅[J].光学学报,2003,23(11):359-1361. |
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| 作者姓名： | 陈四海 程志军 黄光 何苗 易新建 |
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| 作者单位： | 1. 华中科技大学光电子工程系,武汉,430074
2. 华中科技大学激光技术国家重点实验室,武汉,430074 |
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| 基金项目： | 国家自然科学基金 (6 0 1770 11)资助课题 |
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| 摘 要： | 为了降低消反射光栅的偏振敏感性，将等效介质理论推广到二维亚波长结构，对一种特定的矩形柱状结构进行了分析。构造了一种分析方法，然后利用光栅结构的有关表达式得到这种二维结构的近似等效系数。并设计了适用于10．6μm红外波段的二维亚波长消反射光栅，用二元光学的制作工艺在si衬底上进行了实验制备。测试结果表明：对中心波长为10．6μm的红外光，这种光栅象单层消反射膜一样，具有很好的增透效果。
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| 关 键 词： | 物理光学 二元光学 二维光栅 亚波长结构 消反射光栅 等效介质理论 等效折射率 |
| 收稿时间： | 2002/4/25 |
Design and Fabrication of Subwavelength Antireflection Gratings |
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| Chen Sihai,Cheng Zhijun,Huang Guang,He Miao,Yi Xinjian.Design and Fabrication of Subwavelength Antireflection Gratings[J].Acta Optica Sinica,2003,23(11):359-1361. |
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| Authors: | Chen Sihai Cheng Zhijun Huang Guang He Miao Yi Xinjian |
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| Institution: | Received 25 April 2002; revised 11 November 2002 |
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| Abstract: | To reduce the polarization sensitivity of antireflection gratings, a particular rectangular structure was analyzed by genexating equivalent medium theory(EMT) to two-dimensional subwavelength structure. An approximate equivalent coefficient for two-dimensional subwavelength was obtained with the related expressions of grating structure. A two-dimensional subwavelength antireflection grating designed for 10. 6 μm was fabricated on a Si substrate by using binary optical processing. The results show that this grating st ructure was similar to a single antireflection film at 10. 6 μm. |
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| Keywords: | binary optics equivalent medium theory two-dimensional grating subwavelength structure |
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