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Structural and tribological properties of cluster-assembled CNx films |
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| Authors: | M. Blomqvist G. Bongiorno A. Podestà V. Serin G. Abrasonis U. Kreissig W. Möller E. Coronel S. Wachtmeister S. Csillag V. Cassina P. Piseri P. Milani |
| Affiliation: | 1. Dipartimento di Fisica and CIMAINA, Università di Milano, Via Celoria 16, 20133, Milano, Italy 2. CEMES-CNRS, 29 rue J. Marvig, 94347, 31055, Toulouse Cedex, France 3. Institute of Ion Beam Physics and Materials Research, Forschungszentrum Dresden-Rossendorf, PF-510119, 01314, Dresden, Germany 4. The Tribomaterials Group at ?ngstr?m Laboratory, Uppsala University, Box 534, 75121, Uppsala, Sweden 5. Department of Physics, Stockholm University, SCFAB, 10691, Stockholm, Sweden |
| Abstract: | We report the structural and tribological characterization of nanostructured CNx thin films produced by the deposition of a supersonic carbon cluster beam assisted by nitrogen ion bombardment. The influence of the deposition parameters on the chemical composition and structure of the films has been systematically studied by X-ray photoelectron spectroscopy, elastic recoil detection analysis, transmission electron microscopy and atomic force microscopy. Depending on the deposition parameters, the films show a structure ranging from amorphous to disordered graphitic with interlinked planes. Nitrogen content depends on the nitrogen ion kinetic energy. The films have a very low density with a high surface roughness. Friction measurements at the nanoscale show a correlation between nitrogen content and mechanical properties of the system. PACS 61.46-w |
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