| 非相干光反馈表面轮廓测量实验研究 |
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| 引用本文： | 凌进中,马军山,许炯. 非相干光反馈表面轮廓测量实验研究[J]. 光学技术, 2011, 37(2): 148-152 |
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| 作者姓名： | 凌进中 马军山 许炯 |
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| 作者单位： | 上海理工大学光电信息与计算机工程学院,上海,200093 |
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| 基金项目： | 上海市教委科研创新基金项目 |
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| 摘 要： | 数值研究了非相干光反馈时半导体激光器输出功率随反馈系数的变化关系以及待侧物体离焦量与反馈系数的关系.提出了基于非相干光反馈的表面轮廓测量系统,并实验验证了系统的可行性,完成了对一元硬币的二维平面扫描成像,并分析了实验结果中的误差以及可能影响测量结果的主要因素.
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| 关 键 词： | 光学测量 非接触测量 光反馈 轮廓测量 |
Experimental research on surface profile measuring system based on incoherent optical feedback |
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| LING Jinzhong,MA Junshan,XU Jiong. Experimental research on surface profile measuring system based on incoherent optical feedback[J]. Optical Technique, 2011, 37(2): 148-152 |
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| Authors: | LING Jinzhong MA Junshan XU Jiong |
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| Affiliation: | (School of Optical-Electrical and Computer Engineering,University of Shanghai for Science and Technology,Shanghai 200093,China) |
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| Abstract: | Relationships between output power of laser diode and optical feedback coefficient,optical feedback coefficient and defocusing amount are numerically investigated.A novel surface profile measuring system based on incoherent optical feedback is proposed and examined in experiments,the two-dimension images of a one Chinese Yuan coin are gotten.Measurement errors and some significant factors that affect the result also are analyzed. |
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| Keywords: | optical measurement contactless measurement optical feedback profile measurement |
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