Spatially nonlocal model of surface erosion by ion bombardment

A model of solid surface erosion under ion bombardment is proposed. This model takes into account the dependence of the local sputtering yield on the nanoscale relief at a given point and the point of incidence of a primary ion. Such an approach leads to spatially nonlocal erosion model, which predicts the formation of a wavelike relief in the presence of nanoscale inhomogeneities on the surface.