| 一种可用于原子全息光刻的二元计算全息新方法 |
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| 引用本文： | 彭仁军,陈献忠,王艳平,吴健. 一种可用于原子全息光刻的二元计算全息新方法[J]. 强激光与粒子束, 2006, 18(4): 671-674 |
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| 作者姓名： | 彭仁军 陈献忠 王艳平 吴健 |
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| 作者单位： | 电子科技大学,光电信息学院,激光雷达实验室,成都,610054;中国科学院,光电技术研究所微细加工光学技术国家重点实验室,成都,610209 |
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| 摘 要： | 原子全息光刻即采用二元计算全息片掩模来操纵原子，实现微细结构的制作。传统二元计算全息产生的全息片在重现时会产生不止一个实像，这对于原子全息光刻的操作是不利的。提出了一种非相位编码的方法，该方法利用基元函数叠加方式产生实的编码前全息图，再利用类似罗曼Ⅲ型的编码方式产生二元计算全息图。模拟结果表明，利用该方法产生的掩模板可以产生单一的同原始图案相对应的微细结构。
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| 关 键 词： | 原子全息光刻 二元计算全息 编码 微细结构 |
| 文章编号： | 1001-4322(2006)04-0671-04 |
| 收稿时间： | 2005-09-01 |
| 修稿时间： | 2006-02-13 |
A binary computer generated hologram method for atom hologram lithography |
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| PENG Ren-jun,CHEN Xian-zhong,WANG Yan-ping,WU Jian. A binary computer generated hologram method for atom hologram lithography[J]. High Power Laser and Particle Beams, 2006, 18(4): 671-674 |
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| Authors: | PENG Ren-jun CHEN Xian-zhong WANG Yan-ping WU Jian |
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| Affiliation: | 1. Optoelectronic Information Department, University of Electronic Science and Technology of China, Chengdu 610054, China;2. State Key Laboratory of Optical Technology on Microfabrication, Institute of Optics and Electrons,Chinese Academy of Sciences, P.O.Box 350, Chengdu 610209, China |
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| Abstract: | Atom hologram lithography employs binary computer generated hologram to handle atoms for making microstructure. The conventional binary hologram is inconvenient because it often has more than one reconstructed images. A new method of amplitude-only encoding is investigated. A hologram is formed by adding together a series of elementary functions, and then it is encoded with Lohmann Ⅲ like encoding to obtain a binary computer generated hologram. A simulation result shows that the mask made with the new method could produce a unique microstructure according to the original pattern. |
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| Keywords: | Atom hologram lithography Binary computer generated hologram Encoding Microstructure |
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