Microfabrication of cavities in polydimethylsiloxane using DRIE silicon molds |
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| Authors: | Giang Ut-Binh T Lee Dooyoung King Michael R DeLouise Lisa A |
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| Institution: | Department of Biomedical Engineering, University of Rochester, RC Box 270168, Goergen Hall, Rochester, NY 14627, USA. |
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| Abstract: | We present a novel method to create cavities in PDMS that is simple and exhibits wide process latitude allowing control over the radius of curvature to form shallow concave pits or deep spherical cavities. |
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