| Bi_4Ti_3O_(12)薄膜的结构与形貌分析 |
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| 引用本文： | 周正国,周殿清,李江鹏,黄良安. Bi_4Ti_3O_(12)薄膜的结构与形貌分析[J]. 武汉大学学报(理学版), 1996, 0(1) |
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| 作者姓名： | 周正国 周殿清 李江鹏 黄良安 |
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| 作者单位： | 武汉大学物理学系，武汉大学物理学系，武汉大学物理学系，武汉大学物理学系 武汉，430072，武汉，430072，武汉，430072，武汉，430072 |
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| 摘 要： | 采用金属与金属氧化物复合靶的射频溅射法,在S_1,Au,Pt和Ti基片上沉积制备Bi_4Ti_3O_(12)(BTO)铁电薄膜,对不同基片沉积的BTO薄膜,以及不同退火温度下的薄膜的相结构、成分及形貌进行了分析。结果表明,BTO薄膜的结构与退火温度和沉积基片有关,不同基片上钙钛矿结构形成的温度按T_t
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| 关 键 词： | Bi_4Ti_3O_12铁电薄膜 钙钛矿 相结构 |
ANALYSIS OF THE STRUCTURE AND THE PHYSIOGNOMY OF THE Bi_4Ti_3O_(12)FILM |
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| Zhou Zhengguo,Zhou Dianqing,Li Jiangpeng,Huang Liangan. ANALYSIS OF THE STRUCTURE AND THE PHYSIOGNOMY OF THE Bi_4Ti_3O_(12)FILM[J]. JOurnal of Wuhan University:Natural Science Edition, 1996, 0(1) |
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| Authors: | Zhou Zhengguo Zhou Dianqing Li Jiangpeng Huang Liangan |
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| Abstract: | Bi4Ti3O12(BTO) ferroelectric films have been prepared on Si,Au, Pt and Ti substrates rspectively by RF sputtering of metal and metal oxide composed target. The phase structure, composition and physiognomy of the BTO films on different substrates and different annealing temperatures were respectively analysizecl. The results showed that the structure of BTO film depended on the substrate and the annealing temperature, and the temperature of getting perovskite-type BTO film on different substrates were different (Ti< Si
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| Keywords: | Bi4Ti3O12 ferroelectric film perovskite-type phase structure |
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