| AZO透明导电薄膜的制备技术、光电特性及应用 |
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| 引用本文： | 葛春桥,薛亦渝,夏志林.AZO透明导电薄膜的制备技术、光电特性及应用[J].真空电子技术,2004(6):51-54. |
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| 作者姓名： | 葛春桥 薛亦渝 夏志林 |
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| 作者单位： | 武汉理工大学,材料科学与工程学院,湖北,武汉,430070 |
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| 摘 要： | AZO透明导电薄膜是一种半导体氧化物薄膜材料,具有高的载流子浓度和较大的光学禁带宽度,因而具有优异的光电性能,极具应用价值.本文介绍了AZO透明导电薄膜的晶体结构和光电特性,综述了国内外对AZO薄膜所开展的研究工作,并简要地介绍了AZO薄膜的实际应用.
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| 关 键 词： | AZO薄膜 光电特性 禁带宽度 |
| 文章编号： | 1002-8935(2004)06-0051-04 |
| 修稿时间： | 2004年3月10日 |
Preparation, Electrical and Optical Properties and Application of Transparent Conductive AZO Thin Film |
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| GE Chun-qiao,XUE Yi-yu,XIA Zhi-lin.Preparation, Electrical and Optical Properties and Application of Transparent Conductive AZO Thin Film[J].Vacuum Electronics,2004(6):51-54. |
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| Authors: | GE Chun-qiao XUE Yi-yu XIA Zhi-lin |
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| Abstract: | AZO transparent conductive thin film is one of semi-conductive oxide films. Due to both high carrier concentration and large optical band gap,AZO thin film has excellent electrical and optical properties, and is regarded as a potential transparent conductive thin film. In this paper, the microstructure, electrical and optical properties of AZO thin film are introduced, the research results on AZO thin film all over the world are described, and some AZO thin film applications are presented. |
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| Keywords: | AZO thin film Optical and electronical properties Band gap |
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