A new analysis of reciprocated beam bending in electrostatic comb drives using a semi-analytical approach |
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| Institution: | 1. Department of Electrical Engineering, Indian Institute of Technology, Kharagpur 721302, India;2. Advanced Technological Development Centre, Indian Institute of Technology, Kharagpur 721302, India;1. School of Automation, Nanjing University of Science and Technology, Jiangsu 210094, PR China;2. School of Electronics and Information, Nantong University, Jiangsu 226019, PR China;1. School of Mathematical Science, Dalian University of Technology, Dalian, Liaoning 116024, PR China;2. School of Energy and Engineering, Dalian University of Technology, Dalian, Liaoning 116024, PR China;3. School of Environmental and Biological Science and Technology, Dalian University of Technology, Dalian, Liaoning 116012, PR China;1. University of Central Florida, Department of Mathematics, 4000 Central Florida Blvd., Orlando, USA;2. University of Palermo, Department of Mathematics and Computer Science, Via Archirafi 34, 90123 Palermo, Italy;1. Faculty of Applied Mathematics, AGH University of Science and Technology, Mickiewicz Avenue 30, 30059 Kraków, Poland;2. Mathematical Institute, Silesian University in Opava, Na Rybníčku 1, 74601 Opava, Czech Republic;3. Subbotin Institute for Geophysics of NAS of Ukraine, Palladin Avenue 32, 03142 Kyiv, Ukraine |
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| Abstract: | This paper investigates a new modeling and analysis of the voltage induced reciprocated beam bending effects in the unit cell of a planar, variable gap type, capacitive comb drive structures. A semi-analytical approach has been efficiently formulated to solve this coupled electromechanical problem under a steady state condition. The effect of fringe field is also incorporated to improvise on the accuracy of the solution. Additionally, an energy-based method as well as a finite element (FE) based model has been constructed to simulate and validate the semi-analytical approach. The results show that the reciprocated bending of the beams has significant effects on the performance parameters like displacement, capacitance and pull-in characteristics in the comb drive systems. This effect is also seen to vary with applied voltage and stiffness of the combs and springs. Further, a comparison with conventional lumped model shows considerable difference in the estimated values for different parameters indicating a more practical prediction through the proposed approach. Finally, a set of design guidelines is discussed to reduce this bending, so that its effects on the performance of comb drive systems can be minimized. |
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| Keywords: | Euler–Bernoulli beam Comb drives Electrostatic actuation Reciprocated bending Pull-in |
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