Kinetics of formation of discrete nanostructures during vacuum condensation from a single-component vapor |
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Authors: | V M Ievlev E V Shvedov |
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Institution: | (1) Voronezh State Technical University, Moskovskiĭ pr. 14, Voronezh, 394026, Russia |
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Abstract: | The kinetics of cluster formation during the vacuum condensation of thin films from a single-component vapor is investigated
by numerically solving the system of kinetic equations. The size distributions of clusters containing from a few atoms to
several hundred atoms are obtained. The regions of dominant nucleation on active centers (point defects of the crystal substrate)
and random nucleation are determined in the “condensation rate-temperature” coordinates. It is demonstrated that the regions
corresponding to the pseudolayer and three-dimensional (rough) growth mechanisms can be separated in the condensation rate-temperature
coordinates. The inference is made that the experimentally observed bimodal size distributions of islands can be associated
with the difference between the growth rates of clusters at the stage preceding the coalescence. |
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Keywords: | |
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