Physical properties and structure of thin conducting ion-beam modified polymer films |
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| Authors: | Margarita Guenther Gerald Gerlach Gunnar Suchaneck Dieter Schneider Bodo Wolf Alexander Deineka Lubomir Jastrabik |
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| Institution: | 1. Dresden University of Technology, Institute for Solid State Electronics, Mommsenstr. 13, 01062 Dresden, Germany;2. Fraunhofer-Institute for Material and Beam Technology, Winterbergstrasse 28, 01277 Dresden, Germany;3. Dresden University of Technology, Institute for Crystallography and Solid State Physics, Zellescher Weg 16, 01062 Dresden, Germany;4. Institute of Physics, Academy of Sciences of the Czech Republic, Na Slovance 2, 182 21 Prague 8, Czech Republic |
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| Abstract: | In this work, a complex investigation of the film surface composition, chemical bonding, conductivity, optical properties, density, hardness and Young's modulus of ion-beam-modified polyimide films was carried out. It was shown that the partial destruction of chemical bonding under ion bombardment leads to the formation of graphite-like, amorphous carbon islands, which increase the surface film conductivity by several orders of magnitude, from an insulating to a semiconducting region. Strong enhancements of both the conductivity and the optical absorption coefficient occur when the fraction of amorphous carbon clusters dispersed in a polyimide matrix reaches 40 %. The values of hardness, Young's modulus and density at high irradiation doses reach the values typical of a hydrogenated amorphous carbon. |
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| Keywords: | conductivity density ion implantation polyimide XPS |
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