Space- and direction-resolved Langmuir probe diagnostic in rf planar discharges

To consider the anisotropy of the plasma in the sheath regions, Langmuir probe characteristics are measured using a direction-resolving technique. The operation frequency, related to the neutral gas density (/p₀), is chosen in such a way that the electron velocity distribution function (VDF) may be regarded as frozen and the probe diagnostic may be performed without time resolution. In order to prevent convolution of the VDF from the effect of the time-dependent plasma potential, the rf component of the probe bias voltage is compensated to a minimum. The plasma potential, the mean energy of the electrons, and the electron density, averaged over the discharge bulk, are presented as functions of the discharge current and the neutral gas pressure for the O₂ gas. By means of a reactor model based on the theory of plane probes and using the plasma parameter measured, the sheath and bulk portions of the maintaining voltage are separated. In this procedure the thickness of the sheaths in front of the electrodes and the phase difference between discharge current and maintaining voltage are also obtained.