On the reaction kinetics in laser-induced pyrolytic chemical processing |
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Authors: | D Bäuerle B Luk'yanchuk K Piglmayer |
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Institution: | (1) Angewandte Physik, Johannes-Kepler-Universität Linz, A-4040 Linz, Austria |
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Abstract: | Reaction rates, particle densities, and temperature distribution in pyrolytic (photothermal) laser-induced microchemical processing are investigated with respect to temperature and concentration-dependent transport coefficients, and with respect to the effect of thermal diffusion. While the model employed is particularly suitable for laser-induced chemical vapor deposition (LCVD), it can also be applied to many cases of laser-induced surface modification and dry-etching.On leave from: General Physics Institute, Academy of Sciences, SU-117942 Moscow, USSR |
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Keywords: | 42 5 68 82 65 |
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