Quantitative Auger electron spectroscopic analysis of carbides,nitrides and carbonitrides

A novel method for the quantitative evaluation of Auger electron spectra based on peak areas is presented. Sample and reference spectra in integral mode are filtered by an area conserving digital filter. This transforms the peak shapes influenced by chemical effects into standard peak shapes. After filtering a linear combination of reference spectra, differentiated spectra accounting for peak shifts and some low order polynomials to account for variations in the background is fitted to the sample spectrum by a least squares method. The need to approximate the spectrum of the secondary electron background explicitly for direct calculation of peak areas is thus eliminated. Filters of different widths are applied to reduce errors by chemical effects. The composition of the sample is computed from the composition of the reference samples and the coefficients obtained from the fit.To demonstrate the validity of this technique it has been applied to both, Gaussian model peaks and spectra of titanium carbonitrides. A further test on an alloy series is under investigation. The results show that the method works as predicted and gives accurate quantification.