Thickness dependence of grain size and surface roughness for dc magnetron sputtered Au films |
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Authors: | Zhang Xin Song Xiao-Hui Zhang Dian-Lin |
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Affiliation: | Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China |
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Abstract: | The grain size and surface morphology of sputtered Au films are studied by x-ray diffraction and atomic force microscope. For as-deposited samples the grain growth mechanism is consistent with the two-dimensional (2D) theory, which gives relatively low diffusion coefficient during deposition. The annealing process demonstrates the secondary grain growth mechanism in which the thickness dependence of grain boundary energy plays a key role. The surface roughness increases with the increase of grain size. |
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Keywords: | grain size surface morphology Au film magnetron sputtering |
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