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KrF excimer laser ablation of thin Cr film on glass substrate |
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| Authors: | SK Lee SJ Na |
| Institution: | (1) Department of Automation Engineering, Korea Institute of Machinery and Materials (Fax: +82-42/868-7149, E-mail: sklee@mailgw.kimm.re.kr), KR;(2) Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology, KR |
| Abstract: | Received: 5 October 1998 / Accepted: 14 December 1998 / Published online: 24 February 1999 |
| Keywords: | PACS: 42 62 -b 42 55 Lt 42 30 Va |
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