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A two-dimensional high-frequency electrostatic microscanner |
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| Authors: | Yaobo Liu Weizheng Yuan Dayong Qiao Meng Wu Xuan Yang and Bin Lian |
| Affiliation: | 1Key Laboratory of Micro/Nano Systems for Aerospace, Ministry of Education, Xi＇an 710072, China 2 Shaanxi Province Key Laboratory of Micro and Nano Electro-MechanicM Systems, Xi＇an 710072, China 3Northwestern Polytechnical University Shenzhen Institute, Shenzhen 518057, China) |
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