| 波长扫描法布里-珀罗干涉仪的优化设计 |
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| 引用本文： | 王勇,廖延彪,田芊. 波长扫描法布里-珀罗干涉仪的优化设计[J]. 光学学报, 1999, 19(10): 361-1367 |
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| 作者姓名： | 王勇 廖延彪 田芊 |
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| 作者单位： | 1. 清华大学电子工程系,北京,100084
2. 清华大学精密仪器系,北京,100084 |
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| 摘 要： | 分析了可用于绝对距离测量的波长扫描法布里－珀罗干涉仪腔内多光束干涉对输出信号的影响， 及由此产生的相位测量误差。研究表明， 通过选择合适的腔端面反射率和参考腔长度可以减小相位测量误差。优化选择的腔面反射率为０．１０～０．１５， 参考腔长为０．９５ ｍ ｍ ， 在１ ｍ ｍ 范围内系统可达到０．０５ μｍ 的测距精度。
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| 关 键 词： | 波长扫描 法布里-珀罗干涉仪 距离 优化 |
| 收稿时间： | 1998-06-22 |
Optimization of the Wavelength Scanning F-P Interferometer |
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| Wang Yong,Liao Yanbiao,Tian Qian. Optimization of the Wavelength Scanning F-P Interferometer[J]. Acta Optica Sinica, 1999, 19(10): 361-1367 |
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| Authors: | Wang Yong Liao Yanbiao Tian Qian |
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| Affiliation: | Received 22 June 1998; revised 24 |
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| Abstract: | The phase errors, resulting from the multi-beam interference in the Fabry-Perot cavities of the wavelength scanning fiber-optic interferometer for absolute distance measurement, are analyzed. It′s proved that selecting the suitable reflectivities of two F-P cavities and the length of the reference cavity can reduce the phase errors. In authors′ system, the optimal cavity reflectivity is in the range of 0.10～0.15 and the reference cavity length is about 0.95 mm, the accuracy of 0.05 μm can be obtained in the range of 1 mm. |
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| Keywords: | wavelength scanning F P interferometer distance optimization. |
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