| XPS深度剖析的表征 |
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| 引用本文： | 刘昶时 刘慧英. XPS深度剖析的表征[J]. 新疆大学学报(理工版), 1993, 10(1): 41-46 |
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| 作者姓名： | 刘昶时 刘慧英 |
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| 作者单位： | 中国科学院新疆物理研究所，新疆兵团医院 |
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| 摘 要： | 本文基于XPS深度剖析的实验结果,提出了两种不依赖于XPS谱议灵敏度因子的XPS深度剖析实验结果的表征方法,并将此二法与其它三种XPS深度剖析表征法进行了比较。
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| 关 键 词： | 表征 深度剖析 剖面 XPS |
CHARACTERIZATION OF DEPTH-DISSECTION BY XPS |
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| Liu Changshi. CHARACTERIZATION OF DEPTH-DISSECTION BY XPS[J]. Journal of Xinjiang University(Science & Engineering), 1993, 10(1): 41-46 |
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| Authors: | Liu Changshi |
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| Abstract: | Based on the experimental results of depth-dissection by XPS, two new quantitative ways, which are used to express the result of depth-dissection, independent of sensibility factor of element are advanced and they are compared with another three methods to denote profile of interface in this paper. |
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| Keywords: | characterization depth-dissection profile XPS |
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