Principles of X-ray diffractometry of surface acoustic waves |
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| Authors: | I A Schelokov |
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| Institution: | 1. Institute of Microelectronic Technology and High Purity Materials, Russian Academy of Sciences, ul. Akademika Osip’yana 6, Chernogolovka, Moscow district, 142432, Russia
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| Abstract: | Theoretical fundamentals of modern methods of X-ray diffractometry of surface acoustic waves (SAW) are considered briefly. X-ray diffraction on SAW-modulated crystals under total external reflection conditions and the Bragg conditions for the YZ-cut of the LiNbO3 crystal is considered. Agreement of theoretical and experimental results makes it possible to use them for SAW diagnostics. Possibilities and limitations of listed methods for determining the SAW field parameters are discussed. |
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