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Sensor diaphragm under initial tension: Linear analysis
Authors:M Yu  B Balachandran
Institution:(1) Department of Mechanical Engineering, University of Maryland, 20742 College Park, Maryland, USA
Abstract:In this paper, we present recent efforts conducted to investigate the dynamic behavior of a sensor diaphragm under initial tension. A comprehensive mechanics model based on a plate with in-plane tension is presented and analyzed to examine the transition from plate behavior to membrane behavior. It is shown that for certain tension parameter values, it is appropriate to model the diaphragm as a plate-membrane structure rather than as a membrane. The model predictions are found to compare well with experimental results. The analysis and results should be valuable for carrying out the design of circular sensor diaphragms for various applications.
Keywords:Diaphragm  pressure sensor  plate with inplane tension  linear analysis
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