Microwave characterization of YBa2Cu3O7−x thin films grownin situ by Off-axis magnetron sputtering |
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| Authors: | N Sparvieri A M Fiorello L Marescialli M Ambrico |
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| Institution: | (1) Direzione Ricerche, Alenia, Via Tiburtina km 12.4, 00131 Roma, Italy;(2) CRIS, Via Argine 425, 80147 Napoli, Italy |
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| Abstract: | Summary Superconducting films of YBa2Cu3O7−x were depositedin situ on LaAlO3 substrates using single-target 90° off-axis sputtering. The obtained films have tipicalT
c values of 91K. Surface resistance measurements on as-grown films reach 1.1 mΩ at 77K and 10GHz; whilst on ion-etched patterned
resonant linesR
s (77K, 10GHz) it is about 10mΩ.
Paper presented at the ?VII Congresso SATT?, Torino, 4–7 October 1994. |
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| Keywords: | Superconducting films PACS 81 15 Cd Deposition by sputtering |
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