Characterisation of structures grown by Movpe using x-ray diffraction |
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| Institution: | 1. Department of Materials Science and Engineering, Carnegie Mellon University, Pittsburgh, PA 15213, USA;2. Department of Materials Science and Engineering, Ohio State University, Columbus, OH 43210, USA;1. Dept. of Materials Science and Engineering, Monash University, VIC 3800, Australia;2. School of Physics and Astronomy, Monash University, VIC 3800, Australia;3. Monash Centre for Electron Microscopy, Monash University, VIC 3800, Australia;1. State Key Lab of Metal Matrix Composite, School of Materials Science and Engineering, Shanghai Jiao Tong University, 800 Dong Chuan Road, Shanghai 200240, PR China;2. Department of Mechanical and Aerospace Engineering, The Hong Kong University of Science and Technology, Hong Kong, China;3. Department of Materials Science and Engineering, Southern University of Science and Technology, Shenzhen, Guangdong 518055, China;4. Department of Materials Science and Engineering, Graduate School of Engineering, Osaka University, 2-1, Yamada-oka, Suita, Osaka 565-0871, Japan;1. Centro de Vigilancia Sanitaria Veterinaria (VISAVET), Universidad Complutense, 28040 Madrid, Spain;2. Departamento de Sanidad Animal, Facultad de Veterinaria, Universidad Complutense, 28040 Madrid, Spain;3. Groupe de Recherche sur les Maladies Infectieuses du Porc, Faculté de Médecine, Vétérinaire, Université de Montréal, 3200 Sicotte, St.-Hyacinthe, Québec, J2S 2M2, Canada |
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| Abstract: | This paper describes the double and triple axis diffractometers available for characterising heteroepitaxial layer structures in the laboratory environment. The relative merits of the techniques are described.To demonstrate the materials information available from the diffractometer data (usually referred to as rocking curves) examples are given of the analysis of layer thickness and lattice parameter values for single heteroepitaxial layers, two layer structures and multiquantum well structures. For layers with a defect density of less than 105 per cm2 detailed analysis of rocking curve data is carried out by comparing experimental results with simulated data.X-ray diffraction also offers a non-destructive means of fully characterising the state of relaxation of strained layer systems. |
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