Electrostatic forces in micromanipulation: Experimental characterization and simulation including roughness

Manipulation by contact of objects between 1 m and 1 mm are often disturbed by adhesion between the manipulated object and the gripper. Electrostatic forces are among the phenomena responsible for this adhesive effect. Analytical models have been developed in the literature to predict electrostatic forces. Most models have been developed within the framework of scanning probe microscopy, i.e. for a contact between a conducting tip and a metallic surface. In our study, we developed a simulation tool based on finite elements modeling. The strength of this model lies in the fact that it integrates roughness parameters. Measurements of electrostatic forces in function of roughness were conducted by atomic force microscopy. The experimental results were compared with the simulation results showing very good correlation. This demonstrates the influence of surface topography on electrostatic forces, especially for very small separation distances and proves the utility of the simulation tool in designing surfaces with controlled adhesion. Some application fields to which these results can be applied are drug delivery devices and micromanipulation tools.