Liquidly process in femtosecond laser processing |
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Authors: | Yoshiki Nakata Kunio Tsuchida Hirotoshi Furusho |
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Affiliation: | a Institute of Laser Engineering, Osaka University, 2-6 Yamadaoka, Suita, Osaka 565-0871, Japan b Research Center for Ultra-High Voltage Electron Microscopy, Osaka University, 7-1 Mihogaoka, Ibaraki, Osaka 567-0047, Japan |
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Abstract: | Nano-sized water-crown like structure in array was firstly generated on metallic thin film by interfering femtosecond laser processing. We named the structure as “nanocrown”. Ridges are standing on the edge of each ablated hole. The shapes of ridges are spike, nano-waterdrop and bead on column. The radius of the top of a spike was just 7 nm, which is far smaller than that of nanobump generated in the previous work. The self-rising in liquidly process result in the generation of mesoscopic nanostructure with the size between nanohorn or nanotube and micron structures processed by machining or lithography. This is a new surface modification technique in top-down technology. |
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Keywords: | 81.16.&minus c 42.25.Hz 81.07.&minus b 68.55.&minus a 61.46.+w |
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