M-Z型极化DANS聚合物电光波导强度调制器研究

研究了Mach-Zehnder型极化聚合物电光波导强度调制器的制备工艺.器件采用DANS (4-dimethylamino-4′nitro-stlibene)聚合物为电光波导材料，由电光波导层、上下介质缓冲层、上下金属电极层构成五层波导结构.对五层光波导各层之间的光学、化学以及微加工工艺的相互兼容性进行了深入研究.采用紫外光漂白方法制备出侧壁光滑的条波导，采用钨丝电晕极化方法对DANS聚合物波导进行有效极化，使其具有电光特性.通过优化器件制备工艺，研制出工作波长为1300 nm的M-Z型电光波导强度调制器原型器件.实验测得器件半波电压约为10 V，调制带宽约为1 GHz.

Study on Mach-Zehnder Intensity Modulators of Poled DANS Polymer Electro-Optic Waveguides

The fabrication process of Mach-Zehnder modulators of poled polymer electro-optic waveguides has been developed. A DANS(4－dimethylamino－4′nitro-stlibene) polymer was selected as the electro-optic waveguide material. It was formed of five layers that consist of an electro-optic waveguide layer,two buffer layers and two metal electrode layers. The compatible properties of optics,chemistry and micro machining process among the layers were studied deeply. The channel waveguide with glazed sidewall was fabricated by using the ultraviolet photobleaching process. Then,by using the corona-poling setup with a tungsten wire electrode,the films were poled so that the waveguide had electro-optic property. Finally,by optimizing the fabrication process,the model device of M-Z type electro-optic intensity modulators working at 1300 nm wavelength has been developed. The half-wave voltage and modulation bandwidth of the device are about 10 V and 1 GHz,respectively.