氨对硅基铁纳米薄膜高温重凝核的影响

采用弧过滤离子沉积系统（arc filtered deposition，AFD）在纯硅表面制备铁纳米薄膜。研究了750℃下铁纳米薄膜在氢气氛围以及氨气氛围中重凝核的规律。研究表明，在氢气氛围中，铁纳米薄膜重凝核以后形成的铁纳米颗粒随薄膜的厚度增加以及保温时间的延长而增大；但在氨气氛围中，铁纳米薄膜重凝核后形成的纳米颗粒的尺寸随保温时间的变化更为复杂：在氨气作用的初始阶段，铁颗粒的尺寸随氨气作用时间的延长而逐渐变大，但一段时间以后，铁颗粒的尺寸又随氨气作用时间的延长而变小，直到铁颗粒平均直径达到一个最小值（大约在氨气介入后的12min），随后铁颗粒的尺寸又逐渐变大，并最终达到一稳定值。

Effect of Ammonia on The Re-nucleation of Fe Nano-films on Pure Si Substrates

It investigates the focal switch phenomenon of a tilted phase L-G beam passing through a system with the aperture and lens separated. The influence of tilted phase on the focal switch is also studied. The results demonstrate that the tilted phase affects not only the relative shift and the transition height rather than the turning point, but also affects the truncation parameter region when the focal switch appears. In additon,the truncation parameter affects the turning point.