| 精密角度传感器及其标定技术的研究 |
| |
| 引用本文： | 马军山,王向朝,方祖捷,张世宙,清野慧.精密角度传感器及其标定技术的研究[J].光学学报,2001,21(2):32-235. |
| |
| 作者姓名： | 马军山 王向朝 方祖捷 张世宙 清野慧 |
| |
| 作者单位： | 1. 中国科学院上海光学精密机械研究所,
2. 日本东北大学大学院工学研究科, |
| |
| 摘 要： | 介绍了精密角度传感器和不使用任何精密参考仪器的角度传感器的自标定方法。采用补偿技术制作了一对角度传感器，可以克服光源热漂移带来的影响，并进行了标定。两个角度传感器的测量范围为180″，分辨率分别为0．003″，0．004″。平均灵敏度标定的重复性误差为0．015％，线性误差的标定重复性误差为0．015″。
|
| 关 键 词： | 角度传感器 临界反射 自标定 补偿技术 光源热飘移 平均灵敏度 线性误差 |
Precision Angle Sensor and Its Calibration Techniques |
| |
| Ma Junshan,Wang Xiangzhao,Fang Zujie,Zhang Shizhou,SATOSHI Kiyono.Precision Angle Sensor and Its Calibration Techniques[J].Acta Optica Sinica,2001,21(2):32-235. |
| |
| Authors: | Ma Junshan Wang Xiangzhao Fang Zujie Zhang Shizhou SATOSHI Kiyono |
| |
| Abstract: | A high-precision angle sensor and a new method for calibrating precision angle sensor absolutely without any accurate reference instruments are described. Two angle sensors with compensate devices which compensating thermal drift of the light source are developed and calibrated by themselves. The measurement ranges of two angle sensors are 180″, and the resolutions of two angle sensors are 0.003″ and 0.004″, respectively. The repeatability error of the evaluated mean sensitivity was improved to 0.015% by compensating device. The repeatability of the calibrated linearity error was reduced to 0.015″. |
| |
| Keywords: | angle sensor critical reflection self calibration |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
