Excimer laser processing of embedded fibers |
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Authors: | M. W. Sigrist F. K. Tittel |
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Affiliation: | (1) Department of Electrical and Computer Engineering, Rice University, 77251-1892 Houston, TX, USA |
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Abstract: | Novel aspects of the excimer laser etching of nanostructures in embedded optical fibers are discussed. Emphasis is put on the etching of a specified hole geometry and on excellent surface quality of the hole walls.On leave from: Institute of Quantum Electronics, ETH, CH-8093 Zürich, Switzerland |
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Keywords: | 42.60.-v 79.20.Ds |
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