Electronic structure and optical properties of Nb doped Al2O3 on Si by atomic layer deposition |
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| Authors: | Yan Xu Lin Chen Qing-Qing Sun Jing-Jing Gu Hong-Liang Lu Peng-Fei Wang Shi-Jin Ding David Wei Zhang |
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| Institution: | 1. McMaster University, Department of Materials Science and Engineering, Hamilton, Ontario, L8S 4M1, Canada;2. AFCC Automotive Fuel Cell Cooperation Corp., 9000 Glenlyon Parkway, Burnaby, British Columbia, BC, V5J 5J8, Canada;1. Univ Grenoble Alpes, F-38000 Grenoble, France;2. CEA, LETI, MINATEC Campus, F-38054 Grenoble, France;3. National Institute for Materials Science, 1-1 Namiki, Tsukuba, Ibaraki 305-0044, Japan;4. SPEC, CEA, CNRS, Université Paris-Saclay, CEA Saclay, 91191 Gif-sur-Yvette, France;1. Department of Chemical Engineering, Stanford University, Stanford, CA 94305, USA;2. Department of Materials Science and Engineering, Stanford University, Stanford, CA 94305, USA;1. State Key Laboratory of ASIC and System, Shanghai Institute of Intelligent Electronics & Systems, School of Microelectronics, Fudan University, Shanghai 200433, China;2. Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, Shanghai 200092, China;3. Department of Optical Science and Engineering, Fudan University, Shanghai 200433, China;4. Shanghai Key Laboratory of Modern Optical System, School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China |
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| Abstract: | Nb2O5 and Nb doped Al2O3 have proved to be good candidates as resistive switch materials or optical materials. In this letter, we focus on the complex electronic structure and optical properties of Nb doped Al2O3 to give chemical physical images of the films. With the help of SE, XPS and XPS valence band spectra, the detailed electronic structure with atomic bonding structure and optical properties are given. The band gap of a thin oxide film is determined to be 5.05 eV, and the evolution of VBO and CBO of the film on Si are also discussed. |
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