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Computer generated hologram null compensator for optical metrology of a freeform surface
Authors:M.M. Talha  Jun Chang  Yongtian Wang  Dewen Cheng  Tingcheng Zhang  M. Aslam  A. Naeem Khan
Affiliation:1. Institute of Materials Physics, College of Science, Northeast Electric Power University, Jilin, Jilin 132012, China;2. State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, Jilin 130022, China;3. College of Optical Sciences, University of Arizona, Tucson, AZ 85721, USA
Abstract:A computer-generated hologram (CGH) null compensator has been designed for optical metrology of a freeform surface (FFS) with positive base radius. The CGH is being employed in the freeform testing for the first time. The basic concept of the optical metrology and the testing procedure are explained explicitly. The design results of the CGH null compensator are presented in this article. Moreover, the design method and its results are discussed in detail.
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