Deposition of Aerosol Nanoparticles on Flat Substrate Surfaces

The deposition process in a homogeneous electric field, and the subsequent microscopic arrangement of charged, metallic aerosol nanoparticles in the size range of 30 nm on flat substrate surfaces is described. The first aspect of the investigation is the transfer of the particles from a three-dimensional distribution in the gas phase into their arrangement on the substrate surface, in dependence on particle-particle interactions and on Brownian motion. The theoretical results obtained with a trajectory model are compared with experimental results obtained by scanning electron microscope investigation of the deposition patterns. The second aspect of the investigation is the nanostructured arrangement of nanoparticles by means of inhomogeneous electric microfields. We demonstrate a parallel process for the transfer of charge patterns on oxidized silicon surfaces followed by the deposition of monodisperse singly charged nanoparticles, which allows the creation of particle arrangements reaching from 100 nm resolution up to structures in the upper micrometer range. The charge patterns are transferred using a polydimethylsiloxane (PDMS)-stamp, which is covered with a metal layer.