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Silicon‐Compatible Carbon‐Based Micro‐Supercapacitors |
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| Authors: | Dr. Xiaodong Zhuang Prof. Xinliang Feng |
| Affiliation: | Center for Advancing Electronics Dresden (cfaed) and Department of Chemistry and Food Chemistry, Technische Universit?t Dresden, Dresden, Germany |
| Abstract: | |
| Keywords: | carbon materials elastic carbon films micro-supercapacitor power and energy density silicon wafer |