利用压电光声光谱测量镁掺杂氧化锌薄膜的光吸收特性

采用由射频磁控溅射方法在玻璃衬底制备的镁掺杂氧化锌（ZnO：Mg）薄膜材料,通过压电光声光谱法测量其在可见光波段的光吸收特性,并与透射光谱法测得的吸收率数据进行了比较,得到了一致性较好的结果。同时,从理论上推导分析了玻璃衬底上ZnO：Mg压电光声信号与光吸收率的关系及变化规律,并由实验证实：光声信号为玻璃基底与ZnO：Mg薄膜的共同贡献,光声信号的幅值与吸收率呈反相关,这一结论与理论分析得到的结果一致。

Determination of Optical Absorptivity Characteristic of Mg-Doped ZnO Thin Films by Piezoelectric Photoacoustic Spectrometry

The Mg-doped ZnO thin films were prepared on glass substrates by radio frequency magnetron sputtering method,and the optical absorptivity characteristic in visible wavelength range was measured by piezoelectric photoacoustic（PZPA） Spectrometry,and the results compared with the absorptivity data that were obtained by the transmission spectrum method with a good agreement.Meanwhile,the relationship and change rule between optical absorption and PZPA signals ofMg-doped ZnO thin films prepared on glass substrates were theoretically analyzed.Experiments proved that PZPA signals were jointly contributed by Mg-doped ZnO thin films and glass substrates.The amplitude of PZPA signals were correlated negatively with the optical absorption,the result was in accordance with that of theoretic analysis.