Compositional and structural evolution of the titanium dioxide formation by thermal oxidation |
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Authors: | Su Wei-Feng Gnaser Hubert Fan Yong-Liang Jiang Zui-Min and Le Yong-Kang |
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Institution: | Department of Physics, University of Kaiserslautern,
D-67663 Kaiserslautern, Germany;IFOS, University of Kaiserslautern, D-67663
Kaiserslautern, Germany; Surface Physics Laboratory, Department of
Physics, Fudan
University, Shanghai 200433, China; Surface Physics Laboratory, Department of
Physics, Fudan
University, Shanghai 200433, China;IFOS, University of Kaiserslautern, D-67663
Kaiserslautern, Germany |
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Abstract: | Titanium oxide films were prepared by annealing DC magnetron
sputtered titanium films in an oxygen ambient. X-ray diffraction
(XRD), Auger electron spectroscopy (AES) sputter profiling, MCs$^{ +
}$-mode secondary ion mass spectrometry (MCs$^{ + }$-SIMS) and
atomic force microscopy (AFM) were employed, respectively, for the
structural, compositional and morphological characterization of the
obtained films. For temperatures below 875\,K, titanium films could
not be fully oxidized within one hour. Above that temperature, the
completely oxidized films were found to be rutile in structure.
Detailed studies on the oxidation process at 925\,K were carried out
for the understanding of the underlying mechanism of titanium
dioxide (TiOthermal oxidation, titanium
oxide, compositional and structural evolution6000, 8115, 6170ATitanium oxide films were prepared by annealing DC magnetron
sputtered titanium films in an oxygen ambient. X-ray diffraction
(XRD), Auger electron spectroscopy (AES) sputter profiling, MCs$^{ +
}$-mode secondary ion mass spectrometry (MCs$^{ + }$-SIMS) and
atomic force microscopy (AFM) were employed, respectively, for the
structural, compositional and morphological characterization of the
obtained films. For temperatures below 875\,K, titanium films could
not be fully oxidized within one hour. Above that temperature, the
completely oxidized films were found to be rutile in structure.
Detailed studies on the oxidation process at 925\,K were carried out
for the understanding of the underlying mechanism of titanium
dioxide (TiOthermal oxidation, titanium
oxide, compositional and structural evolution6000, 8115, 6170ATitanium oxide films were prepared by annealing DC magnetron
sputtered titanium films in an oxygen ambient. X-ray diffraction
(XRD), Auger electron spectroscopy (AES) sputter profiling, MCs$^{ +
}$-mode secondary ion mass spectrometry (MCs$^{ + }$-SIMS) and
atomic force microscopy (AFM) were employed, respectively, for the
structural, compositional and morphological characterization of the
obtained films. For temperatures below 875\,K, titanium films could
not be fully oxidized within one hour. Above that temperature, the
completely oxidized films were found to be rutile in structure.
Detailed studies on the oxidation process at 925\,K were carried out
for the understanding of the underlying mechanism of titanium
dioxide (TiOthermal oxidation, titanium
oxide, compositional and structural evolution6000, 8115, 6170ATitanium oxide films were prepared by annealing DC magnetron
sputtered titanium films in an oxygen ambient. X-ray diffraction
(XRD), Auger electron spectroscopy (AES) sputter profiling, MCs$^{ +
}$-mode secondary ion mass spectrometry (MCs$^{ + }$-SIMS) and
atomic force microscopy (AFM) were employed, respectively, for the
structural, compositional and morphological characterization of the
obtained films. For temperatures below 875\,K, titanium films could
not be fully oxidized within one hour. Above that temperature, the
completely oxidized films were found to be rutile in structure.
Detailed studies on the oxidation process at 925\,K were carried out
for the understanding of the underlying mechanism of titanium
dioxide (TiO$_{2})$ formation by thermal oxidation. It was
demonstrated that the formation of crystalline TiO$_{2}$ could be
divided into a short oxidation stage, followed by crystal forming
stage. Relevance of this recognition was further discussed. |
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Keywords: | thermal oxidation titanium
oxide compositional and structural evolution |
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